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Benefits of an Inverted Cylindrical Cathode Configuration - Denton Vacuum
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The sputtering system: 1—cylindrical stainless-steel chamber; 2—cathode; 3—circular anode
Planar Target - an overview | ScienceDirect Topics
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Origin of particles during reactive sputtering of oxides using planar and cylindrical magnetrons
PDF) Distribution of Sputtered Films from a C-Mag Cylindrical Source | Peter Sieck - Academia.edu
Section III Sputtering © 1998, Angus Rockett. - ppt download
